5/29/2011	9:01:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	9:01:05 AM	Recipe started at 9:01 AM
5/29/2011	9:01:06 AM	H2 valve closed
5/29/2011	9:01:06 AM	BCl3 valve closed
5/29/2011	9:01:06 AM	PH3 valve closed
5/29/2011	9:01:06 AM	SiCl4 pre valve closed
5/29/2011	9:01:06 AM	SiCl4 post valve closed
5/29/2011	9:01:06 AM	Main Vac valve closed
5/29/2011	9:01:06 AM	Bypass valve closed
5/29/2011	9:01:06 AM	Bubbler valve closed
5/29/2011	9:01:06 AM	Helium valve opened
5/29/2011	9:01:06 AM	Helium MFC set to  500.000000
5/29/2011	9:01:06 AM	H2 MFC set to  0.000000
5/29/2011	9:01:06 AM	BCl3 MFC set to  0.000000
5/29/2011	9:01:06 AM	PHl3 MFC set to  0.000000
5/29/2011	9:01:06 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:01:06 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:01:06 AM	Tube furnace set to 0
5/29/2011	9:02:26 AM	Helium valve closed
5/29/2011	9:02:26 AM	H2 valve closed
5/29/2011	9:02:26 AM	BCl3 valve closed
5/29/2011	9:02:26 AM	PH3 valve closed
5/29/2011	9:02:26 AM	SiCl4 pre valve closed
5/29/2011	9:02:26 AM	SiCl4 post valve closed
5/29/2011	9:02:26 AM	Main Vac valve closed
5/29/2011	9:02:26 AM	Bypass valve closed
5/29/2011	9:02:26 AM	Bubbler valve closed
5/29/2011	9:02:26 AM	Helium MFC set to  0.000000
5/29/2011	9:02:26 AM	H2 MFC set to  0.000000
5/29/2011	9:02:26 AM	BCl3 MFC set to  0.000000
5/29/2011	9:02:26 AM	PHl3 MFC set to  0.000000
5/29/2011	9:02:26 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:02:26 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:02:26 AM	Tube furnace set to 0
5/29/2011	9:02:27 AM	Run finished at 9:02 AM
5/29/2011	9:02:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	9:06:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:06:43 AM	Recipe started at 9:06 AM
5/29/2011	9:06:43 AM	Helium valve closed
5/29/2011	9:06:43 AM	H2 valve closed
5/29/2011	9:06:43 AM	BCl3 valve closed
5/29/2011	9:06:43 AM	PH3 valve closed
5/29/2011	9:06:43 AM	SiCl4 pre valve closed
5/29/2011	9:06:43 AM	SiCl4 post valve closed
5/29/2011	9:06:43 AM	Main Vac valve closed
5/29/2011	9:06:43 AM	Bubbler valve closed
5/29/2011	9:06:43 AM	Bypass valve opened
5/29/2011	9:06:43 AM	Helium MFC set to  0.000000
5/29/2011	9:06:43 AM	H2 MFC set to  0.000000
5/29/2011	9:06:43 AM	BCl3 MFC set to  0.000000
5/29/2011	9:06:43 AM	PHl3 MFC set to  0.000000
5/29/2011	9:06:43 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:06:43 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:06:43 AM	Tube furnace set to 0
5/29/2011	9:07:15 AM	Helium valve closed
5/29/2011	9:07:15 AM	H2 valve closed
5/29/2011	9:07:15 AM	BCl3 valve closed
5/29/2011	9:07:15 AM	PH3 valve closed
5/29/2011	9:07:15 AM	SiCl4 pre valve closed
5/29/2011	9:07:15 AM	SiCl4 post valve closed
5/29/2011	9:07:15 AM	Bubbler valve closed
5/29/2011	9:07:15 AM	Main Vac valve opened
5/29/2011	9:07:15 AM	Bypass valve opened
5/29/2011	9:07:15 AM	Helium MFC set to  0.000000
5/29/2011	9:07:15 AM	H2 MFC set to  0.000000
5/29/2011	9:07:15 AM	BCl3 MFC set to  0.000000
5/29/2011	9:07:15 AM	PHl3 MFC set to  0.000000
5/29/2011	9:07:15 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:07:15 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:07:15 AM	Tube furnace set to 0
5/29/2011	9:07:15 AM	Run finished at 9:07 AM
5/29/2011	9:07:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:07:32 AM	Helium valve opened
5/29/2011	9:07:34 AM	Helium MFC set to  100.000000
5/29/2011	9:10:30 AM	Helium MFC set to  0.000000
5/29/2011	9:10:31 AM	Helium valve closed
5/29/2011	9:10:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	9:10:33 AM	Recipe started at 9:10 AM
5/29/2011	9:10:33 AM	H2 valve closed
5/29/2011	9:10:33 AM	BCl3 valve closed
5/29/2011	9:10:33 AM	PH3 valve closed
5/29/2011	9:10:33 AM	SiCl4 pre valve closed
5/29/2011	9:10:33 AM	SiCl4 post valve closed
5/29/2011	9:10:33 AM	Main Vac valve closed
5/29/2011	9:10:33 AM	Bypass valve closed
5/29/2011	9:10:33 AM	Bubbler valve closed
5/29/2011	9:10:33 AM	Helium valve opened
5/29/2011	9:10:33 AM	Helium MFC set to  500.000000
5/29/2011	9:10:33 AM	H2 MFC set to  0.000000
5/29/2011	9:10:33 AM	BCl3 MFC set to  0.000000
5/29/2011	9:10:33 AM	PHl3 MFC set to  0.000000
5/29/2011	9:10:33 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:10:33 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:10:33 AM	Tube furnace set to 0
5/29/2011	9:11:54 AM	Helium valve closed
5/29/2011	9:11:54 AM	H2 valve closed
5/29/2011	9:11:54 AM	BCl3 valve closed
5/29/2011	9:11:54 AM	PH3 valve closed
5/29/2011	9:11:54 AM	SiCl4 pre valve closed
5/29/2011	9:11:54 AM	SiCl4 post valve closed
5/29/2011	9:11:54 AM	Main Vac valve closed
5/29/2011	9:11:54 AM	Bypass valve closed
5/29/2011	9:11:54 AM	Bubbler valve closed
5/29/2011	9:11:54 AM	Helium MFC set to  0.000000
5/29/2011	9:11:54 AM	H2 MFC set to  0.000000
5/29/2011	9:11:54 AM	BCl3 MFC set to  0.000000
5/29/2011	9:11:54 AM	PHl3 MFC set to  0.000000
5/29/2011	9:11:54 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:11:54 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:11:54 AM	Tube furnace set to 0
5/29/2011	9:11:55 AM	Run finished at 9:11 AM
5/29/2011	9:11:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	9:13:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:13:13 AM	Recipe started at 9:13 AM
5/29/2011	9:13:13 AM	Helium valve closed
5/29/2011	9:13:13 AM	H2 valve closed
5/29/2011	9:13:13 AM	BCl3 valve closed
5/29/2011	9:13:13 AM	PH3 valve closed
5/29/2011	9:13:13 AM	SiCl4 pre valve closed
5/29/2011	9:13:13 AM	SiCl4 post valve closed
5/29/2011	9:13:13 AM	Main Vac valve closed
5/29/2011	9:13:13 AM	Bubbler valve closed
5/29/2011	9:13:13 AM	Bypass valve opened
5/29/2011	9:13:13 AM	Helium MFC set to  0.000000
5/29/2011	9:13:13 AM	H2 MFC set to  0.000000
5/29/2011	9:13:13 AM	BCl3 MFC set to  0.000000
5/29/2011	9:13:13 AM	PHl3 MFC set to  0.000000
5/29/2011	9:13:13 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:13:13 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:13:13 AM	Tube furnace set to 0
5/29/2011	9:13:45 AM	Helium valve closed
5/29/2011	9:13:45 AM	H2 valve closed
5/29/2011	9:13:45 AM	BCl3 valve closed
5/29/2011	9:13:45 AM	PH3 valve closed
5/29/2011	9:13:45 AM	SiCl4 pre valve closed
5/29/2011	9:13:45 AM	SiCl4 post valve closed
5/29/2011	9:13:45 AM	Bubbler valve closed
5/29/2011	9:13:45 AM	Main Vac valve opened
5/29/2011	9:13:45 AM	Bypass valve opened
5/29/2011	9:13:45 AM	Helium MFC set to  0.000000
5/29/2011	9:13:45 AM	H2 MFC set to  0.000000
5/29/2011	9:13:45 AM	BCl3 MFC set to  0.000000
5/29/2011	9:13:45 AM	PHl3 MFC set to  0.000000
5/29/2011	9:13:45 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:13:45 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:13:45 AM	Tube furnace set to 0
5/29/2011	9:13:45 AM	Run finished at 9:13 AM
5/29/2011	9:13:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:17:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:17:40 AM	Recipe started at 9:17 AM
5/29/2011	9:17:40 AM	Helium valve closed
5/29/2011	9:17:40 AM	H2 valve closed
5/29/2011	9:17:40 AM	BCl3 valve closed
5/29/2011	9:17:40 AM	PH3 valve closed
5/29/2011	9:17:40 AM	SiCl4 pre valve closed
5/29/2011	9:17:40 AM	SiCl4 post valve closed
5/29/2011	9:17:40 AM	Main Vac valve closed
5/29/2011	9:17:40 AM	Bubbler valve closed
5/29/2011	9:17:40 AM	Bypass valve opened
5/29/2011	9:17:40 AM	Helium MFC set to  0.000000
5/29/2011	9:17:40 AM	H2 MFC set to  0.000000
5/29/2011	9:17:40 AM	BCl3 MFC set to  0.000000
5/29/2011	9:17:40 AM	PHl3 MFC set to  0.000000
5/29/2011	9:17:40 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:17:40 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:17:40 AM	Tube furnace set to 0
5/29/2011	9:17:41 AM	Helium valve closed
5/29/2011	9:17:41 AM	H2 valve closed
5/29/2011	9:17:41 AM	BCl3 valve closed
5/29/2011	9:17:41 AM	PH3 valve closed
5/29/2011	9:17:41 AM	SiCl4 pre valve closed
5/29/2011	9:17:41 AM	SiCl4 post valve closed
5/29/2011	9:17:41 AM	Bubbler valve closed
5/29/2011	9:17:41 AM	Main Vac valve opened
5/29/2011	9:17:41 AM	Bypass valve opened
5/29/2011	9:17:41 AM	Helium MFC set to  0.000000
5/29/2011	9:17:41 AM	H2 MFC set to  0.000000
5/29/2011	9:17:41 AM	BCl3 MFC set to  0.000000
5/29/2011	9:17:41 AM	PHl3 MFC set to  0.000000
5/29/2011	9:17:41 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:17:41 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:17:41 AM	Tube furnace set to 0
5/29/2011	9:17:41 AM	Run finished at 9:17 AM
5/29/2011	9:17:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	9:17:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/29/2011	9:17:55 AM	Recipe started at 9:17 AM
5/29/2011	9:17:55 AM	Helium valve closed
5/29/2011	9:17:55 AM	H2 valve closed
5/29/2011	9:17:55 AM	BCl3 valve closed
5/29/2011	9:17:55 AM	PH3 valve closed
5/29/2011	9:17:55 AM	SiCl4 pre valve closed
5/29/2011	9:17:55 AM	SiCl4 post valve closed
5/29/2011	9:17:55 AM	Main Vac valve closed
5/29/2011	9:17:55 AM	Bubbler valve closed
5/29/2011	9:17:55 AM	Bypass valve opened
5/29/2011	9:17:55 AM	Helium MFC set to  0.000000
5/29/2011	9:17:55 AM	H2 MFC set to  0.000000
5/29/2011	9:17:55 AM	BCl3 MFC set to  0.000000
5/29/2011	9:17:55 AM	PHl3 MFC set to  0.000000
5/29/2011	9:17:55 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:17:55 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:17:55 AM	Tube furnace set to 0
5/29/2011	9:17:56 AM	Helium valve closed
5/29/2011	9:17:56 AM	H2 valve closed
5/29/2011	9:17:56 AM	BCl3 valve closed
5/29/2011	9:17:56 AM	PH3 valve closed
5/29/2011	9:17:56 AM	SiCl4 pre valve closed
5/29/2011	9:17:56 AM	SiCl4 post valve closed
5/29/2011	9:17:56 AM	Bubbler valve closed
5/29/2011	9:17:56 AM	Main Vac valve opened
5/29/2011	9:17:56 AM	Bypass valve opened
5/29/2011	9:17:56 AM	Helium MFC set to  0.000000
5/29/2011	9:17:56 AM	H2 MFC set to  0.000000
5/29/2011	9:17:56 AM	BCl3 MFC set to  0.000000
5/29/2011	9:17:56 AM	PHl3 MFC set to  0.000000
5/29/2011	9:17:56 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:17:56 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:17:56 AM	Tube furnace set to 0
5/29/2011	9:18:01 AM	H2 valve closed
5/29/2011	9:18:01 AM	BCl3 valve closed
5/29/2011	9:18:01 AM	PH3 valve closed
5/29/2011	9:18:01 AM	SiCl4 pre valve closed
5/29/2011	9:18:01 AM	SiCl4 post valve closed
5/29/2011	9:18:01 AM	Bubbler valve closed
5/29/2011	9:18:01 AM	Helium valve opened
5/29/2011	9:18:01 AM	Main Vac valve opened
5/29/2011	9:18:01 AM	Bypass valve opened
5/29/2011	9:18:01 AM	Helium MFC set to  100.000000
5/29/2011	9:18:01 AM	H2 MFC set to  0.000000
5/29/2011	9:18:01 AM	BCl3 MFC set to  0.000000
5/29/2011	9:18:01 AM	PHl3 MFC set to  0.000000
5/29/2011	9:18:01 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:18:01 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:18:01 AM	Tube furnace set to 0
5/29/2011	9:19:01 AM	Helium valve closed
5/29/2011	9:19:01 AM	H2 valve closed
5/29/2011	9:19:01 AM	BCl3 valve closed
5/29/2011	9:19:01 AM	PH3 valve closed
5/29/2011	9:19:01 AM	SiCl4 pre valve closed
5/29/2011	9:19:01 AM	SiCl4 post valve closed
5/29/2011	9:19:01 AM	Bubbler valve closed
5/29/2011	9:19:01 AM	Main Vac valve opened
5/29/2011	9:19:01 AM	Bypass valve opened
5/29/2011	9:19:01 AM	Helium MFC set to  0.000000
5/29/2011	9:19:01 AM	H2 MFC set to  0.000000
5/29/2011	9:19:01 AM	BCl3 MFC set to  0.000000
5/29/2011	9:19:01 AM	PHl3 MFC set to  0.000000
5/29/2011	9:19:01 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:19:01 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:19:01 AM	Tube furnace set to 0
5/29/2011	9:20:01 AM	H2 valve closed
5/29/2011	9:20:01 AM	BCl3 valve closed
5/29/2011	9:20:01 AM	PH3 valve closed
5/29/2011	9:20:01 AM	SiCl4 pre valve closed
5/29/2011	9:20:01 AM	SiCl4 post valve closed
5/29/2011	9:20:01 AM	Bubbler valve closed
5/29/2011	9:20:01 AM	Helium valve opened
5/29/2011	9:20:01 AM	Main Vac valve opened
5/29/2011	9:20:01 AM	Bypass valve opened
5/29/2011	9:20:01 AM	Helium MFC set to  100.000000
5/29/2011	9:20:01 AM	H2 MFC set to  0.000000
5/29/2011	9:20:01 AM	BCl3 MFC set to  0.000000
5/29/2011	9:20:01 AM	PHl3 MFC set to  0.000000
5/29/2011	9:20:01 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:20:01 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:20:01 AM	Tube furnace set to 0
5/29/2011	9:21:01 AM	Helium valve closed
5/29/2011	9:21:01 AM	H2 valve closed
5/29/2011	9:21:01 AM	BCl3 valve closed
5/29/2011	9:21:01 AM	PH3 valve closed
5/29/2011	9:21:01 AM	SiCl4 pre valve closed
5/29/2011	9:21:01 AM	SiCl4 post valve closed
5/29/2011	9:21:01 AM	Bubbler valve closed
5/29/2011	9:21:01 AM	Main Vac valve opened
5/29/2011	9:21:01 AM	Bypass valve opened
5/29/2011	9:21:01 AM	Helium MFC set to  0.000000
5/29/2011	9:21:01 AM	H2 MFC set to  0.000000
5/29/2011	9:21:01 AM	BCl3 MFC set to  0.000000
5/29/2011	9:21:01 AM	PHl3 MFC set to  0.000000
5/29/2011	9:21:01 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:21:01 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:21:01 AM	Tube furnace set to 0
5/29/2011	9:22:01 AM	H2 valve closed
5/29/2011	9:22:01 AM	BCl3 valve closed
5/29/2011	9:22:01 AM	PH3 valve closed
5/29/2011	9:22:01 AM	SiCl4 pre valve closed
5/29/2011	9:22:01 AM	SiCl4 post valve closed
5/29/2011	9:22:01 AM	Bubbler valve closed
5/29/2011	9:22:01 AM	Helium valve opened
5/29/2011	9:22:01 AM	Main Vac valve opened
5/29/2011	9:22:01 AM	Bypass valve opened
5/29/2011	9:22:01 AM	Helium MFC set to  100.000000
5/29/2011	9:22:01 AM	H2 MFC set to  0.000000
5/29/2011	9:22:01 AM	BCl3 MFC set to  0.000000
5/29/2011	9:22:01 AM	PHl3 MFC set to  0.000000
5/29/2011	9:22:01 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:22:01 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:22:02 AM	Tube furnace set to 0
5/29/2011	9:23:02 AM	Helium valve closed
5/29/2011	9:23:02 AM	H2 valve closed
5/29/2011	9:23:02 AM	BCl3 valve closed
5/29/2011	9:23:02 AM	PH3 valve closed
5/29/2011	9:23:02 AM	SiCl4 pre valve closed
5/29/2011	9:23:02 AM	SiCl4 post valve closed
5/29/2011	9:23:02 AM	Bubbler valve closed
5/29/2011	9:23:02 AM	Main Vac valve opened
5/29/2011	9:23:02 AM	Bypass valve opened
5/29/2011	9:23:02 AM	Helium MFC set to  0.000000
5/29/2011	9:23:02 AM	H2 MFC set to  0.000000
5/29/2011	9:23:02 AM	BCl3 MFC set to  0.000000
5/29/2011	9:23:02 AM	PHl3 MFC set to  0.000000
5/29/2011	9:23:02 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:23:02 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:23:02 AM	Tube furnace set to 0
5/29/2011	9:24:02 AM	H2 valve closed
5/29/2011	9:24:02 AM	BCl3 valve closed
5/29/2011	9:24:02 AM	PH3 valve closed
5/29/2011	9:24:02 AM	SiCl4 pre valve closed
5/29/2011	9:24:02 AM	SiCl4 post valve closed
5/29/2011	9:24:02 AM	Bubbler valve closed
5/29/2011	9:24:02 AM	Helium valve opened
5/29/2011	9:24:02 AM	Main Vac valve opened
5/29/2011	9:24:02 AM	Bypass valve opened
5/29/2011	9:24:02 AM	Helium MFC set to  100.000000
5/29/2011	9:24:02 AM	H2 MFC set to  0.000000
5/29/2011	9:24:02 AM	BCl3 MFC set to  0.000000
5/29/2011	9:24:02 AM	PHl3 MFC set to  0.000000
5/29/2011	9:24:02 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:24:02 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:24:02 AM	Tube furnace set to 0
5/29/2011	9:25:02 AM	Helium valve closed
5/29/2011	9:25:02 AM	H2 valve closed
5/29/2011	9:25:02 AM	BCl3 valve closed
5/29/2011	9:25:02 AM	PH3 valve closed
5/29/2011	9:25:02 AM	SiCl4 pre valve closed
5/29/2011	9:25:02 AM	SiCl4 post valve closed
5/29/2011	9:25:02 AM	Bubbler valve closed
5/29/2011	9:25:02 AM	Main Vac valve opened
5/29/2011	9:25:02 AM	Bypass valve opened
5/29/2011	9:25:02 AM	Helium MFC set to  0.000000
5/29/2011	9:25:02 AM	H2 MFC set to  0.000000
5/29/2011	9:25:02 AM	BCl3 MFC set to  0.000000
5/29/2011	9:25:02 AM	PHl3 MFC set to  0.000000
5/29/2011	9:25:02 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:25:02 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:25:02 AM	Tube furnace set to 0
5/29/2011	9:26:02 AM	H2 valve closed
5/29/2011	9:26:02 AM	BCl3 valve closed
5/29/2011	9:26:02 AM	PH3 valve closed
5/29/2011	9:26:02 AM	SiCl4 pre valve closed
5/29/2011	9:26:02 AM	SiCl4 post valve closed
5/29/2011	9:26:02 AM	Bubbler valve closed
5/29/2011	9:26:02 AM	Helium valve opened
5/29/2011	9:26:02 AM	Main Vac valve opened
5/29/2011	9:26:02 AM	Bypass valve opened
5/29/2011	9:26:02 AM	Helium MFC set to  100.000000
5/29/2011	9:26:02 AM	H2 MFC set to  0.000000
5/29/2011	9:26:02 AM	BCl3 MFC set to  0.000000
5/29/2011	9:26:02 AM	PHl3 MFC set to  0.000000
5/29/2011	9:26:02 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:26:02 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:26:02 AM	Tube furnace set to 0
5/29/2011	9:27:02 AM	Helium valve closed
5/29/2011	9:27:02 AM	H2 valve closed
5/29/2011	9:27:02 AM	BCl3 valve closed
5/29/2011	9:27:02 AM	PH3 valve closed
5/29/2011	9:27:02 AM	SiCl4 pre valve closed
5/29/2011	9:27:02 AM	SiCl4 post valve closed
5/29/2011	9:27:02 AM	Bubbler valve closed
5/29/2011	9:27:02 AM	Main Vac valve opened
5/29/2011	9:27:02 AM	Bypass valve opened
5/29/2011	9:27:02 AM	Helium MFC set to  0.000000
5/29/2011	9:27:02 AM	H2 MFC set to  0.000000
5/29/2011	9:27:02 AM	BCl3 MFC set to  0.000000
5/29/2011	9:27:02 AM	PHl3 MFC set to  0.000000
5/29/2011	9:27:02 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:27:02 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:27:03 AM	Tube furnace set to 0
5/29/2011	9:28:03 AM	H2 valve closed
5/29/2011	9:28:03 AM	BCl3 valve closed
5/29/2011	9:28:03 AM	PH3 valve closed
5/29/2011	9:28:03 AM	SiCl4 pre valve closed
5/29/2011	9:28:03 AM	SiCl4 post valve closed
5/29/2011	9:28:03 AM	Bubbler valve closed
5/29/2011	9:28:03 AM	Helium valve opened
5/29/2011	9:28:03 AM	Main Vac valve opened
5/29/2011	9:28:03 AM	Bypass valve opened
5/29/2011	9:28:03 AM	Helium MFC set to  100.000000
5/29/2011	9:28:03 AM	H2 MFC set to  0.000000
5/29/2011	9:28:03 AM	BCl3 MFC set to  0.000000
5/29/2011	9:28:03 AM	PHl3 MFC set to  0.000000
5/29/2011	9:28:03 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:28:03 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:28:03 AM	Tube furnace set to 0
5/29/2011	9:29:03 AM	Helium valve closed
5/29/2011	9:29:03 AM	H2 valve closed
5/29/2011	9:29:03 AM	BCl3 valve closed
5/29/2011	9:29:03 AM	PH3 valve closed
5/29/2011	9:29:03 AM	SiCl4 pre valve closed
5/29/2011	9:29:03 AM	SiCl4 post valve closed
5/29/2011	9:29:03 AM	Bubbler valve closed
5/29/2011	9:29:03 AM	Main Vac valve opened
5/29/2011	9:29:03 AM	Bypass valve opened
5/29/2011	9:29:03 AM	Helium MFC set to  0.000000
5/29/2011	9:29:03 AM	H2 MFC set to  0.000000
5/29/2011	9:29:03 AM	BCl3 MFC set to  0.000000
5/29/2011	9:29:03 AM	PHl3 MFC set to  0.000000
5/29/2011	9:29:03 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:29:03 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:29:03 AM	Tube furnace set to 0
5/29/2011	9:30:03 AM	H2 valve closed
5/29/2011	9:30:03 AM	BCl3 valve closed
5/29/2011	9:30:03 AM	PH3 valve closed
5/29/2011	9:30:03 AM	SiCl4 pre valve closed
5/29/2011	9:30:03 AM	SiCl4 post valve closed
5/29/2011	9:30:03 AM	Bubbler valve closed
5/29/2011	9:30:03 AM	Helium valve opened
5/29/2011	9:30:03 AM	Main Vac valve opened
5/29/2011	9:30:03 AM	Bypass valve opened
5/29/2011	9:30:03 AM	Helium MFC set to  100.000000
5/29/2011	9:30:03 AM	H2 MFC set to  0.000000
5/29/2011	9:30:03 AM	BCl3 MFC set to  0.000000
5/29/2011	9:30:03 AM	PHl3 MFC set to  0.000000
5/29/2011	9:30:03 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:30:03 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:30:03 AM	Tube furnace set to 0
5/29/2011	9:31:03 AM	Helium valve closed
5/29/2011	9:31:03 AM	H2 valve closed
5/29/2011	9:31:03 AM	BCl3 valve closed
5/29/2011	9:31:03 AM	PH3 valve closed
5/29/2011	9:31:03 AM	SiCl4 pre valve closed
5/29/2011	9:31:03 AM	SiCl4 post valve closed
5/29/2011	9:31:03 AM	Bubbler valve closed
5/29/2011	9:31:03 AM	Main Vac valve opened
5/29/2011	9:31:03 AM	Bypass valve opened
5/29/2011	9:31:03 AM	Helium MFC set to  0.000000
5/29/2011	9:31:03 AM	H2 MFC set to  0.000000
5/29/2011	9:31:03 AM	BCl3 MFC set to  0.000000
5/29/2011	9:31:03 AM	PHl3 MFC set to  0.000000
5/29/2011	9:31:03 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:31:03 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:31:03 AM	Tube furnace set to 0
5/29/2011	9:32:03 AM	H2 valve closed
5/29/2011	9:32:03 AM	BCl3 valve closed
5/29/2011	9:32:03 AM	PH3 valve closed
5/29/2011	9:32:03 AM	SiCl4 pre valve closed
5/29/2011	9:32:03 AM	SiCl4 post valve closed
5/29/2011	9:32:03 AM	Bubbler valve closed
5/29/2011	9:32:03 AM	Helium valve opened
5/29/2011	9:32:03 AM	Main Vac valve opened
5/29/2011	9:32:03 AM	Bypass valve opened
5/29/2011	9:32:03 AM	Helium MFC set to  100.000000
5/29/2011	9:32:03 AM	H2 MFC set to  0.000000
5/29/2011	9:32:03 AM	BCl3 MFC set to  0.000000
5/29/2011	9:32:03 AM	PHl3 MFC set to  0.000000
5/29/2011	9:32:03 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:32:03 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:32:04 AM	Tube furnace set to 0
5/29/2011	9:33:04 AM	Helium valve closed
5/29/2011	9:33:04 AM	H2 valve closed
5/29/2011	9:33:04 AM	BCl3 valve closed
5/29/2011	9:33:04 AM	PH3 valve closed
5/29/2011	9:33:04 AM	SiCl4 pre valve closed
5/29/2011	9:33:04 AM	SiCl4 post valve closed
5/29/2011	9:33:04 AM	Bubbler valve closed
5/29/2011	9:33:04 AM	Main Vac valve opened
5/29/2011	9:33:04 AM	Bypass valve opened
5/29/2011	9:33:04 AM	Helium MFC set to  0.000000
5/29/2011	9:33:04 AM	H2 MFC set to  0.000000
5/29/2011	9:33:04 AM	BCl3 MFC set to  0.000000
5/29/2011	9:33:04 AM	PHl3 MFC set to  0.000000
5/29/2011	9:33:04 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:33:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:33:04 AM	Tube furnace set to 0
5/29/2011	9:34:04 AM	H2 valve closed
5/29/2011	9:34:04 AM	BCl3 valve closed
5/29/2011	9:34:04 AM	PH3 valve closed
5/29/2011	9:34:04 AM	SiCl4 pre valve closed
5/29/2011	9:34:04 AM	SiCl4 post valve closed
5/29/2011	9:34:04 AM	Bubbler valve closed
5/29/2011	9:34:04 AM	Helium valve opened
5/29/2011	9:34:04 AM	Main Vac valve opened
5/29/2011	9:34:04 AM	Bypass valve opened
5/29/2011	9:34:04 AM	Helium MFC set to  100.000000
5/29/2011	9:34:04 AM	H2 MFC set to  0.000000
5/29/2011	9:34:04 AM	BCl3 MFC set to  0.000000
5/29/2011	9:34:04 AM	PHl3 MFC set to  0.000000
5/29/2011	9:34:04 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:34:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:34:04 AM	Tube furnace set to 0
5/29/2011	9:35:04 AM	Helium valve closed
5/29/2011	9:35:04 AM	H2 valve closed
5/29/2011	9:35:04 AM	BCl3 valve closed
5/29/2011	9:35:04 AM	PH3 valve closed
5/29/2011	9:35:04 AM	SiCl4 pre valve closed
5/29/2011	9:35:04 AM	SiCl4 post valve closed
5/29/2011	9:35:04 AM	Bubbler valve closed
5/29/2011	9:35:04 AM	Main Vac valve opened
5/29/2011	9:35:04 AM	Bypass valve opened
5/29/2011	9:35:04 AM	Helium MFC set to  0.000000
5/29/2011	9:35:04 AM	H2 MFC set to  0.000000
5/29/2011	9:35:04 AM	BCl3 MFC set to  0.000000
5/29/2011	9:35:04 AM	PHl3 MFC set to  0.000000
5/29/2011	9:35:04 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:35:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:35:04 AM	Tube furnace set to 0
5/29/2011	9:36:04 AM	H2 valve closed
5/29/2011	9:36:04 AM	BCl3 valve closed
5/29/2011	9:36:04 AM	PH3 valve closed
5/29/2011	9:36:04 AM	SiCl4 pre valve closed
5/29/2011	9:36:04 AM	SiCl4 post valve closed
5/29/2011	9:36:04 AM	Bubbler valve closed
5/29/2011	9:36:04 AM	Helium valve opened
5/29/2011	9:36:04 AM	Main Vac valve opened
5/29/2011	9:36:04 AM	Bypass valve opened
5/29/2011	9:36:04 AM	Helium MFC set to  100.000000
5/29/2011	9:36:04 AM	H2 MFC set to  0.000000
5/29/2011	9:36:04 AM	BCl3 MFC set to  0.000000
5/29/2011	9:36:04 AM	PHl3 MFC set to  0.000000
5/29/2011	9:36:04 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:36:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:36:04 AM	Tube furnace set to 0
5/29/2011	9:37:04 AM	Helium valve closed
5/29/2011	9:37:04 AM	H2 valve closed
5/29/2011	9:37:04 AM	BCl3 valve closed
5/29/2011	9:37:04 AM	PH3 valve closed
5/29/2011	9:37:04 AM	SiCl4 pre valve closed
5/29/2011	9:37:04 AM	SiCl4 post valve closed
5/29/2011	9:37:04 AM	Bubbler valve closed
5/29/2011	9:37:04 AM	Main Vac valve opened
5/29/2011	9:37:04 AM	Bypass valve opened
5/29/2011	9:37:04 AM	Helium MFC set to  0.000000
5/29/2011	9:37:04 AM	H2 MFC set to  0.000000
5/29/2011	9:37:04 AM	BCl3 MFC set to  0.000000
5/29/2011	9:37:04 AM	PHl3 MFC set to  0.000000
5/29/2011	9:37:04 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:37:04 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:37:05 AM	Tube furnace set to 0
5/29/2011	9:37:06 AM	Run finished at 9:37 AM
5/29/2011	9:37:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/29/2011	9:52:59 AM	Recipe started at 9:52 AM
5/29/2011	9:52:59 AM	Helium valve closed
5/29/2011	9:52:59 AM	BCl3 valve closed
5/29/2011	9:52:59 AM	PH3 valve closed
5/29/2011	9:52:59 AM	SiCl4 pre valve closed
5/29/2011	9:52:59 AM	SiCl4 post valve closed
5/29/2011	9:52:59 AM	Main Vac valve closed
5/29/2011	9:52:59 AM	Bypass valve closed
5/29/2011	9:52:59 AM	Bubbler valve closed
5/29/2011	9:52:59 AM	H2 valve opened
5/29/2011	9:52:59 AM	Helium MFC set to  0.000000
5/29/2011	9:52:59 AM	H2 MFC set to  500.000000
5/29/2011	9:52:59 AM	BCl3 MFC set to  0.000000
5/29/2011	9:52:59 AM	PHl3 MFC set to  0.000000
5/29/2011	9:52:59 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:52:59 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:52:59 AM	Tube furnace set to 0
5/29/2011	9:54:24 AM	Helium valve closed
5/29/2011	9:54:24 AM	BCl3 valve closed
5/29/2011	9:54:24 AM	PH3 valve closed
5/29/2011	9:54:24 AM	SiCl4 pre valve closed
5/29/2011	9:54:24 AM	SiCl4 post valve closed
5/29/2011	9:54:24 AM	Main Vac valve closed
5/29/2011	9:54:24 AM	Bypass valve closed
5/29/2011	9:54:24 AM	H2 valve opened
5/29/2011	9:54:24 AM	Bubbler valve opened
5/29/2011	9:54:24 AM	Helium MFC set to  0.000000
5/29/2011	9:54:24 AM	H2 MFC set to  500.000000
5/29/2011	9:54:24 AM	BCl3 MFC set to  0.000000
5/29/2011	9:54:24 AM	PHl3 MFC set to  0.000000
5/29/2011	9:54:24 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:54:24 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:54:24 AM	Tube furnace set to 1000
5/29/2011	9:54:25 AM	Helium valve closed
5/29/2011	9:54:25 AM	H2 valve closed
5/29/2011	9:54:25 AM	BCl3 valve closed
5/29/2011	9:54:25 AM	PH3 valve closed
5/29/2011	9:54:25 AM	SiCl4 pre valve closed
5/29/2011	9:54:25 AM	SiCl4 post valve closed
5/29/2011	9:54:25 AM	Main Vac valve closed
5/29/2011	9:54:25 AM	Bubbler valve closed
5/29/2011	9:54:25 AM	Bypass valve closed
5/29/2011	9:54:25 AM	Helium MFC set to  0.000000
5/29/2011	9:54:25 AM	H2 MFC set to  0.000000
5/29/2011	9:54:25 AM	BCl3 MFC set to  0.000000
5/29/2011	9:54:25 AM	PHl3 MFC set to  0.000000
5/29/2011	9:54:25 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:54:25 AM	Bypass solenoid MFC set to  760.000000
5/29/2011	9:54:25 AM	Tube furnace set to 0
5/29/2011	9:54:25 AM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
5/29/2011	9:54:45 AM	Run aborted at 9:54 AM
5/29/2011	9:55:26 AM	Recipe started at 9:55 AM
5/29/2011	9:55:26 AM	Helium valve closed
5/29/2011	9:55:26 AM	BCl3 valve closed
5/29/2011	9:55:26 AM	PH3 valve closed
5/29/2011	9:55:26 AM	SiCl4 pre valve closed
5/29/2011	9:55:26 AM	SiCl4 post valve closed
5/29/2011	9:55:26 AM	Main Vac valve closed
5/29/2011	9:55:26 AM	Bypass valve closed
5/29/2011	9:55:26 AM	Bubbler valve closed
5/29/2011	9:55:26 AM	H2 valve opened
5/29/2011	9:55:26 AM	Helium MFC set to  0.000000
5/29/2011	9:55:26 AM	H2 MFC set to  500.000000
5/29/2011	9:55:26 AM	BCl3 MFC set to  0.000000
5/29/2011	9:55:26 AM	PHl3 MFC set to  0.000000
5/29/2011	9:55:26 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:55:26 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:55:26 AM	Tube furnace set to 0
5/29/2011	9:55:30 AM	Helium valve closed
5/29/2011	9:55:30 AM	BCl3 valve closed
5/29/2011	9:55:30 AM	PH3 valve closed
5/29/2011	9:55:30 AM	SiCl4 pre valve closed
5/29/2011	9:55:30 AM	SiCl4 post valve closed
5/29/2011	9:55:30 AM	Main Vac valve closed
5/29/2011	9:55:30 AM	Bypass valve closed
5/29/2011	9:55:30 AM	H2 valve opened
5/29/2011	9:55:30 AM	Bubbler valve opened
5/29/2011	9:55:30 AM	Helium MFC set to  0.000000
5/29/2011	9:55:30 AM	H2 MFC set to  500.000000
5/29/2011	9:55:30 AM	BCl3 MFC set to  0.000000
5/29/2011	9:55:30 AM	PHl3 MFC set to  0.000000
5/29/2011	9:55:30 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:55:30 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:55:30 AM	Tube furnace set to 1000
5/29/2011	9:55:31 AM	Helium valve closed
5/29/2011	9:55:31 AM	H2 valve closed
5/29/2011	9:55:31 AM	BCl3 valve closed
5/29/2011	9:55:31 AM	PH3 valve closed
5/29/2011	9:55:31 AM	SiCl4 pre valve closed
5/29/2011	9:55:31 AM	SiCl4 post valve closed
5/29/2011	9:55:31 AM	Main Vac valve closed
5/29/2011	9:55:31 AM	Bubbler valve closed
5/29/2011	9:55:31 AM	Bypass valve closed
5/29/2011	9:55:31 AM	Helium MFC set to  0.000000
5/29/2011	9:55:31 AM	H2 MFC set to  0.000000
5/29/2011	9:55:31 AM	BCl3 MFC set to  0.000000
5/29/2011	9:55:31 AM	PHl3 MFC set to  0.000000
5/29/2011	9:55:31 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:55:31 AM	Bypass solenoid MFC set to  760.000000
5/29/2011	9:55:31 AM	Tube furnace set to 0
5/29/2011	9:55:31 AM	Baratron reads 749.484945 Torr and NaOH valve is open.  Emergency exit.
5/29/2011	9:55:39 AM	Run aborted at 9:55 AM
5/29/2011	9:55:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2011	9:55:50 AM	Recipe started at 9:55 AM
5/29/2011	9:55:50 AM	Helium valve closed
5/29/2011	9:55:50 AM	H2 valve closed
5/29/2011	9:55:50 AM	BCl3 valve closed
5/29/2011	9:55:50 AM	PH3 valve closed
5/29/2011	9:55:50 AM	SiCl4 pre valve closed
5/29/2011	9:55:50 AM	SiCl4 post valve closed
5/29/2011	9:55:50 AM	Main Vac valve closed
5/29/2011	9:55:50 AM	Bypass valve closed
5/29/2011	9:55:50 AM	Bubbler valve closed
5/29/2011	9:55:50 AM	Helium MFC set to  0.000000
5/29/2011	9:55:50 AM	H2 MFC set to  0.000000
5/29/2011	9:55:50 AM	BCl3 MFC set to  0.000000
5/29/2011	9:55:50 AM	PHl3 MFC set to  0.000000
5/29/2011	9:55:50 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:55:50 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:55:50 AM	Tube furnace set to 0
5/29/2011	9:55:51 AM	Run finished at 9:55 AM
5/29/2011	9:55:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2011	9:55:57 AM	H2 MFC set to  500.000000
5/29/2011	9:55:59 AM	H2 valve opened
5/29/2011	9:56:01 AM	Bubbler valve opened
5/29/2011	9:56:40 AM	Bubbler valve closed
5/29/2011	9:56:41 AM	H2 valve closed
5/29/2011	9:56:43 AM	H2 MFC set to  0.000000
5/29/2011	9:56:52 AM	Recipe started at 9:56 AM
5/29/2011	9:56:52 AM	Helium valve closed
5/29/2011	9:56:52 AM	BCl3 valve closed
5/29/2011	9:56:52 AM	PH3 valve closed
5/29/2011	9:56:52 AM	SiCl4 pre valve closed
5/29/2011	9:56:52 AM	SiCl4 post valve closed
5/29/2011	9:56:52 AM	Main Vac valve closed
5/29/2011	9:56:52 AM	Bypass valve closed
5/29/2011	9:56:52 AM	Bubbler valve closed
5/29/2011	9:56:52 AM	H2 valve opened
5/29/2011	9:56:52 AM	Helium MFC set to  0.000000
5/29/2011	9:56:52 AM	H2 MFC set to  500.000000
5/29/2011	9:56:52 AM	BCl3 MFC set to  0.000000
5/29/2011	9:56:52 AM	PHl3 MFC set to  0.000000
5/29/2011	9:56:52 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:56:52 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:56:52 AM	Tube furnace set to 0
5/29/2011	9:56:55 AM	Helium valve closed
5/29/2011	9:56:55 AM	BCl3 valve closed
5/29/2011	9:56:55 AM	PH3 valve closed
5/29/2011	9:56:55 AM	SiCl4 pre valve closed
5/29/2011	9:56:55 AM	SiCl4 post valve closed
5/29/2011	9:56:55 AM	Main Vac valve closed
5/29/2011	9:56:55 AM	Bypass valve closed
5/29/2011	9:56:55 AM	H2 valve opened
5/29/2011	9:56:55 AM	Bubbler valve opened
5/29/2011	9:56:55 AM	Helium MFC set to  0.000000
5/29/2011	9:56:55 AM	H2 MFC set to  500.000000
5/29/2011	9:56:55 AM	BCl3 MFC set to  0.000000
5/29/2011	9:56:55 AM	PHl3 MFC set to  0.000000
5/29/2011	9:56:55 AM	SiCl4 MFC set to  0.000000
5/29/2011	9:56:55 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	9:56:55 AM	Tube furnace set to 1000
5/29/2011	10:06:00 AM	Helium valve closed
5/29/2011	10:06:00 AM	PH3 valve closed
5/29/2011	10:06:00 AM	Main Vac valve closed
5/29/2011	10:06:00 AM	Bypass valve closed
5/29/2011	10:06:00 AM	H2 valve opened
5/29/2011	10:06:00 AM	BCl3 valve opened
5/29/2011	10:06:00 AM	SiCl4 pre valve opened
5/29/2011	10:06:00 AM	SiCl4 post valve opened
5/29/2011	10:06:00 AM	Bubbler valve opened
5/29/2011	10:06:00 AM	Helium MFC set to  0.000000
5/29/2011	10:06:00 AM	H2 MFC set to  500.000000
5/29/2011	10:06:00 AM	BCl3 MFC set to  10.000000
5/29/2011	10:06:00 AM	PHl3 MFC set to  0.000000
5/29/2011	10:06:00 AM	SiCl4 MFC set to  50.000000
5/29/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	10:06:00 AM	Tube furnace set to 1000
5/29/2011	10:09:31 AM	Helium valve closed
5/29/2011	10:09:31 AM	PH3 valve closed
5/29/2011	10:09:31 AM	Main Vac valve closed
5/29/2011	10:09:31 AM	Bypass valve closed
5/29/2011	10:09:31 AM	H2 valve opened
5/29/2011	10:09:31 AM	BCl3 valve opened
5/29/2011	10:09:31 AM	SiCl4 pre valve opened
5/29/2011	10:09:31 AM	SiCl4 post valve opened
5/29/2011	10:09:31 AM	Bubbler valve opened
5/29/2011	10:09:31 AM	Helium MFC set to  0.000000
5/29/2011	10:09:31 AM	H2 MFC set to  500.000000
5/29/2011	10:09:31 AM	BCl3 MFC set to  10.000000
5/29/2011	10:09:31 AM	PHl3 MFC set to  0.000000
5/29/2011	10:09:31 AM	SiCl4 MFC set to  50.000000
5/29/2011	10:09:31 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	10:09:31 AM	Tube furnace set to 1000
5/29/2011	10:14:31 AM	H2 valve closed
5/29/2011	10:14:31 AM	BCl3 valve closed
5/29/2011	10:14:31 AM	PH3 valve closed
5/29/2011	10:14:31 AM	SiCl4 pre valve closed
5/29/2011	10:14:31 AM	SiCl4 post valve closed
5/29/2011	10:14:31 AM	Main Vac valve closed
5/29/2011	10:14:31 AM	Bypass valve closed
5/29/2011	10:14:31 AM	Helium valve opened
5/29/2011	10:14:31 AM	Bubbler valve opened
5/29/2011	10:14:31 AM	Helium MFC set to  500.000000
5/29/2011	10:14:31 AM	H2 MFC set to  0.000000
5/29/2011	10:14:31 AM	BCl3 MFC set to  0.000000
5/29/2011	10:14:31 AM	PHl3 MFC set to  0.000000
5/29/2011	10:14:31 AM	SiCl4 MFC set to  0.000000
5/29/2011	10:14:31 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	10:14:31 AM	Tube furnace set to 0
5/29/2011	10:34:31 AM	Helium valve closed
5/29/2011	10:34:31 AM	H2 valve closed
5/29/2011	10:34:31 AM	BCl3 valve closed
5/29/2011	10:34:31 AM	PH3 valve closed
5/29/2011	10:34:31 AM	SiCl4 pre valve closed
5/29/2011	10:34:31 AM	SiCl4 post valve closed
5/29/2011	10:34:31 AM	Main Vac valve closed
5/29/2011	10:34:31 AM	Bypass valve closed
5/29/2011	10:34:31 AM	Bubbler valve closed
5/29/2011	10:34:31 AM	Helium MFC set to  0.000000
5/29/2011	10:34:31 AM	H2 MFC set to  0.000000
5/29/2011	10:34:31 AM	BCl3 MFC set to  0.000000
5/29/2011	10:34:31 AM	PHl3 MFC set to  0.000000
5/29/2011	10:34:31 AM	SiCl4 MFC set to  0.000000
5/29/2011	10:34:31 AM	Bypass solenoid MFC set to  0.000000
5/29/2011	10:34:31 AM	Tube furnace set to 0
5/29/2011	10:34:32 AM	Run finished at 10:34 AM
5/29/2011	4:25:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	4:25:22 PM	Recipe started at 4:25 PM
5/29/2011	4:25:22 PM	H2 valve closed
5/29/2011	4:25:22 PM	BCl3 valve closed
5/29/2011	4:25:22 PM	PH3 valve closed
5/29/2011	4:25:22 PM	SiCl4 pre valve closed
5/29/2011	4:25:22 PM	SiCl4 post valve closed
5/29/2011	4:25:22 PM	Main Vac valve closed
5/29/2011	4:25:22 PM	Bypass valve closed
5/29/2011	4:25:22 PM	Bubbler valve closed
5/29/2011	4:25:22 PM	Helium valve opened
5/29/2011	4:25:22 PM	Helium MFC set to  500.000000
5/29/2011	4:25:22 PM	H2 MFC set to  0.000000
5/29/2011	4:25:22 PM	BCl3 MFC set to  0.000000
5/29/2011	4:25:22 PM	PHl3 MFC set to  0.000000
5/29/2011	4:25:22 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:25:22 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:25:22 PM	Tube furnace set to 0
5/29/2011	4:25:35 PM	Helium valve closed
5/29/2011	4:25:35 PM	H2 valve closed
5/29/2011	4:25:35 PM	BCl3 valve closed
5/29/2011	4:25:35 PM	PH3 valve closed
5/29/2011	4:25:35 PM	SiCl4 pre valve closed
5/29/2011	4:25:35 PM	SiCl4 post valve closed
5/29/2011	4:25:35 PM	Main Vac valve closed
5/29/2011	4:25:35 PM	Bypass valve closed
5/29/2011	4:25:35 PM	Bubbler valve closed
5/29/2011	4:25:35 PM	Helium MFC set to  0.000000
5/29/2011	4:25:35 PM	H2 MFC set to  0.000000
5/29/2011	4:25:35 PM	BCl3 MFC set to  0.000000
5/29/2011	4:25:35 PM	PHl3 MFC set to  0.000000
5/29/2011	4:25:35 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:25:35 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:25:35 PM	Tube furnace set to 0
5/29/2011	4:25:35 PM	Run finished at 4:25 PM
5/29/2011	4:25:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/29/2011	4:26:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	4:26:56 PM	Recipe started at 4:26 PM
5/29/2011	4:26:56 PM	Helium valve closed
5/29/2011	4:26:56 PM	H2 valve closed
5/29/2011	4:26:57 PM	BCl3 valve closed
5/29/2011	4:26:57 PM	PH3 valve closed
5/29/2011	4:26:57 PM	SiCl4 pre valve closed
5/29/2011	4:26:57 PM	SiCl4 post valve closed
5/29/2011	4:26:57 PM	Main Vac valve closed
5/29/2011	4:26:57 PM	Bubbler valve closed
5/29/2011	4:26:57 PM	Bypass valve opened
5/29/2011	4:26:57 PM	Helium MFC set to  0.000000
5/29/2011	4:26:57 PM	H2 MFC set to  0.000000
5/29/2011	4:26:57 PM	BCl3 MFC set to  0.000000
5/29/2011	4:26:57 PM	PHl3 MFC set to  0.000000
5/29/2011	4:26:57 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:26:57 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:26:57 PM	Tube furnace set to 0
5/29/2011	4:27:29 PM	Helium valve closed
5/29/2011	4:27:29 PM	H2 valve closed
5/29/2011	4:27:29 PM	BCl3 valve closed
5/29/2011	4:27:29 PM	PH3 valve closed
5/29/2011	4:27:29 PM	SiCl4 pre valve closed
5/29/2011	4:27:29 PM	SiCl4 post valve closed
5/29/2011	4:27:29 PM	Bubbler valve closed
5/29/2011	4:27:29 PM	Main Vac valve opened
5/29/2011	4:27:29 PM	Bypass valve opened
5/29/2011	4:27:29 PM	Helium MFC set to  0.000000
5/29/2011	4:27:29 PM	H2 MFC set to  0.000000
5/29/2011	4:27:29 PM	BCl3 MFC set to  0.000000
5/29/2011	4:27:29 PM	PHl3 MFC set to  0.000000
5/29/2011	4:27:29 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:27:29 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:27:29 PM	Tube furnace set to 0
5/29/2011	4:27:30 PM	Run finished at 4:27 PM
5/29/2011	4:27:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	4:29:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2011	4:29:25 PM	Recipe started at 4:29 PM
5/29/2011	4:29:25 PM	Helium valve closed
5/29/2011	4:29:25 PM	H2 valve closed
5/29/2011	4:29:25 PM	BCl3 valve closed
5/29/2011	4:29:25 PM	PH3 valve closed
5/29/2011	4:29:25 PM	SiCl4 pre valve closed
5/29/2011	4:29:25 PM	SiCl4 post valve closed
5/29/2011	4:29:25 PM	Main Vac valve closed
5/29/2011	4:29:25 PM	Bypass valve closed
5/29/2011	4:29:25 PM	Bubbler valve closed
5/29/2011	4:29:25 PM	Helium MFC set to  0.000000
5/29/2011	4:29:25 PM	H2 MFC set to  0.000000
5/29/2011	4:29:25 PM	BCl3 MFC set to  0.000000
5/29/2011	4:29:25 PM	PHl3 MFC set to  0.000000
5/29/2011	4:29:25 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:29:25 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:29:25 PM	Tube furnace set to 0
5/29/2011	4:29:25 PM	Run finished at 4:29 PM
5/29/2011	4:29:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2011	4:45:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	4:45:16 PM	Recipe started at 4:45 PM
5/29/2011	4:45:16 PM	Helium valve closed
5/29/2011	4:45:16 PM	H2 valve closed
5/29/2011	4:45:16 PM	BCl3 valve closed
5/29/2011	4:45:16 PM	PH3 valve closed
5/29/2011	4:45:16 PM	SiCl4 pre valve closed
5/29/2011	4:45:16 PM	SiCl4 post valve closed
5/29/2011	4:45:16 PM	Main Vac valve closed
5/29/2011	4:45:16 PM	Bubbler valve closed
5/29/2011	4:45:16 PM	Bypass valve opened
5/29/2011	4:45:16 PM	Helium MFC set to  0.000000
5/29/2011	4:45:16 PM	H2 MFC set to  0.000000
5/29/2011	4:45:16 PM	BCl3 MFC set to  0.000000
5/29/2011	4:45:16 PM	PHl3 MFC set to  0.000000
5/29/2011	4:45:16 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:45:16 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:45:16 PM	Tube furnace set to 0
5/29/2011	4:45:17 PM	Helium valve closed
5/29/2011	4:45:17 PM	H2 valve closed
5/29/2011	4:45:17 PM	BCl3 valve closed
5/29/2011	4:45:17 PM	PH3 valve closed
5/29/2011	4:45:17 PM	SiCl4 pre valve closed
5/29/2011	4:45:17 PM	SiCl4 post valve closed
5/29/2011	4:45:17 PM	Bubbler valve closed
5/29/2011	4:45:17 PM	Main Vac valve opened
5/29/2011	4:45:17 PM	Bypass valve opened
5/29/2011	4:45:17 PM	Helium MFC set to  0.000000
5/29/2011	4:45:17 PM	H2 MFC set to  0.000000
5/29/2011	4:45:17 PM	BCl3 MFC set to  0.000000
5/29/2011	4:45:17 PM	PHl3 MFC set to  0.000000
5/29/2011	4:45:17 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:45:17 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:45:17 PM	Tube furnace set to 0
5/29/2011	4:45:17 PM	Run finished at 4:45 PM
5/29/2011	4:45:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/29/2011	4:45:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/29/2011	4:45:24 PM	Recipe started at 4:45 PM
5/29/2011	4:45:24 PM	Helium valve closed
5/29/2011	4:45:24 PM	H2 valve closed
5/29/2011	4:45:24 PM	BCl3 valve closed
5/29/2011	4:45:24 PM	PH3 valve closed
5/29/2011	4:45:24 PM	SiCl4 pre valve closed
5/29/2011	4:45:24 PM	SiCl4 post valve closed
5/29/2011	4:45:24 PM	Main Vac valve closed
5/29/2011	4:45:24 PM	Bypass valve closed
5/29/2011	4:45:24 PM	Bubbler valve closed
5/29/2011	4:45:24 PM	Helium MFC set to  0.000000
5/29/2011	4:45:24 PM	H2 MFC set to  0.000000
5/29/2011	4:45:24 PM	BCl3 MFC set to  0.000000
5/29/2011	4:45:24 PM	PHl3 MFC set to  0.000000
5/29/2011	4:45:24 PM	SiCl4 MFC set to  0.000000
5/29/2011	4:45:24 PM	Bypass solenoid MFC set to  0.000000
5/29/2011	4:45:24 PM	Tube furnace set to 0
5/29/2011	4:45:24 PM	Run finished at 4:45 PM
5/29/2011	4:45:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
